Eventos Anais de eventos
DINAME 2023
XIX International Symposium on Dynamic Problems of Mechanics
Reconstructing nanoscale topography using a controlled vibrating fiber and iterative model inversion
Submission Author:
Izhak Bucher , Haifa , Israel
Co-Authors:
Izhak Bucher
Presenter: Izhak Bucher
doi://10.26678/ABCM.DINAME2023.DIN2023-0124
Abstract
Measuring Nanoscale topography presents a great challenge to microelectronics industries. Presented is a method to reconstruct the topography of surface contours in inaccessible regions without contact, exploiting the intermolecular forces between a vibrating fiber and the measured surface. In small scales the Van der Waals (VdW) interaction forces produce measurable changes and in larger scale, magnetic interaction serves the same purpose. A vibrating Nanowire is incrementally inserted into grooves or moved along a measured surface and multiple measurements are combined to reconstruct the measured topography. A nonlinear inverse problem is solved iteratively after performing an automatic calibration stage. Simulated examples are provided for magnetic and VdW forces alongside large-scale experiment with magnetic forces.
Keywords
Topography reconstruction, Inverse problem, Nonlinear force identification, Autoresonance
