Eventos Anais de eventos
COBEF 2017
Congresso Brasileiro de Engenharia de Fabricação
DEPOSIÇÃO DE FILMES FINOS DE COBRE POR GAIOLA CATÓDICA: ANÁLISE DO CONFINAMENTO DO PLASMA ATRAVÉS DO AUMENTO DA ESPESSURA DA TAMPA DA GAIOLA CATÓDICA
Submission Author:
Fernanda Fernandes , RN
Co-Authors:
Bruno Dantas, Igor Oliveira Nascimento, Thercio Costa, Rômulo Ribeiro, Edalmy Oliveira
Presenter: Fernanda Fernandes
doi://10.26678/ABCM.COBEF2017.COF2017-0030
Abstract
The plasma nitriding improves various physical properties of metal surfaces such as hardness, resistance to wear and corrosion, contributing to increasing the useful life of the samples. However, there are also some disadvantages, and therefore various alternatives to the nitriding process were created. This work aims to evaluate the effect on plasma confinement and its influence on the deposited layer using cathodic cage technique with addition of argon in the atmosphere of the reactor by changing the thickness of the cage lid, from where will be extracted the desired material to cover the surface of the sample. A literature review was conducted to assess the technical efficiency of the plasma jet, when compared the deposition parameters and geometry of the cage. Thereafter, deposition was conducted with a duration of 1h30m used copper cage cover and ordinary glass as a sample. Reviewed also, the initial and final weight, defining the resulting weight of the depositions. All treatments had a variation in the thickness of the lid, keeping the flow parameters, pressure, temperature, and current, controlled and fixed. Finally, a direct relationship between the continuous film and increasing the thickness was observed, they were, the greater the thickness, the better the film until it reaches the climax (peak) with a thickness of 6 mm cage. However, the thicknesses of 12 mm and 24 mm, observed a decrease in film quality. Furthermore, note that it was possible to obtain copper films in all samples, which was confirmed by analysis of DRX. concludes, then, that the configuration of the cage influence on the deposition parameters, so that, as greater the greater thickness will the current, thus the higher the pressure. The deposition thickness from 6 mm cover is the one that has the most continuous film, that is, better plasma confinement to the parameters analyzed.
Keywords
Deposition by plasma, cathodic cage, thin film of copper
