Eventos Anais de eventos
COBEM 2019
25th International Congress of Mechanical Engineering
CONCEPTUAL DESIGN OF A CLEAN AIR ENCLOSURE TEST BENCH FOR MICRODEVICES
Submission Author:
Daduí Cordeiro Guerrieri , RJ , Brazil
Co-Authors:
Daduí Cordeiro Guerrieri, JEZIEL NUNES
Presenter: Daduí Cordeiro Guerrieri
doi://10.26678/ABCM.COBEM2019.COB2019-2366
Abstract
An environment to handle microdevices is a challenge because the natural dust has a size which is relatively big when compared to the microdevices. The dusts might cause irreparable damage to microdevices such as short circuit in electronic systems, clogging in microfluidic systems, and even corrosion in the materials. The dust is a real challenge when facing the micro and nano world whether during fabrication, integration, testing and/or in actual use. In order to overcome this challenge, the CEFET/RJ research group of Thermal Science in Micro and Macro Scale designed a conceptual clean air enclosure test bench to be used for microdevices experiments. The test bench system is designed to have full control of the cleanliness, pressure, temperature, and humidity. Additionally, it is used to perform a different kind of experiments using different atmospheric conditions.
Keywords
Cleanliness, workplace, Clean air enclosure, microdevices
