Eventos Anais de eventos
COBEM 2017
24th ABCM International Congress of Mechanical Engineering
PRODUCTION OF ALN THIN FILMS VIA DEEP OSCILLATION MAGNETRON SPUTTERING FOR BIOSENSORS
Submission Author:
OLIMPIA SALAS , Mexico , Mexico
Co-Authors:
OLIMPIA SALAS, Jianliang Lin, LIZBETH MELO-MAXIMO, Abril Erendira Murillo Sanchez, DULCE VIRIDIANA MELO MAXIMO, Jacqueline Oliva Ramírez
Presenter: OLIMPIA SALAS
doi://10.26678/ABCM.COBEM2017.COB17-0390
Abstract
AlN thin films were produced by Modulated Pulse Power Magnetron Sputtering (MPPMS) on two different substrates: 304L stainless steel and Si wafer. The structural differences between the resulting films were analyzed and compared as well as their response to biofunctionalization.
Keywords
