Eventos Anais de eventos
ENCIT 2020
18th Brazilian Congress of Thermal Sciences and Engineering
PARTICLE DISTRIBUTION ANALYSIS IN A CLEAN AIR ENCLOSURE WITH A KNOWN PARTICLE SOURCE
Submission Author:
Antônio Correa , RJ
Co-Authors:
Antônio Correa, Daduí Cordeiro Guerrieri, JEZIEL NUNES
Presenter: Antônio Correa
doi://10.26678/ABCM.ENCIT2020.CIT20-0501
Abstract
Microdevices are getting even more popular with applications in many different areas such as medical, aerospace, communication, and others. A real challenge to manufacture, and assembly these devices is a very clean environment which is usually expensive to maintain. These environments need a special air recycling system, in charge to clean the air from dust and to control the humidity, temperature, and pressure. The level of cleanliness of these environments is defined by ISO 14644-1, stipulating the concentration of contaminants per cubic meter. Due to the cost assigned to build a conventional clean room, the CEFET/RJ research group of Thermal Science in Micro and Macro Scale is designing a low-cost clean air enclosure system. This system is designed to achieve the level of cleanliness as class 100 (ISO5), making it possible to work safely with microdevices. This work aims to study the airflow and the contaminant distribution inside the designed clean air enclosure, considering a controlled particle source which could be, for instance, a manufacturing process. A sensitivity analysis is used to verify the optimum inlet and outlet flow position by using the numerical simulation of the CONTAM 3.2 software. The results provide the optimum input and output position on this designed clean air enclosure presenting the flow characteristics and dust concentration.
Keywords
microdevices, Cleanroom, Clean air enclosure, CONTAM, Particles concentration
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