COBEM99

S3 Ciências dos Materiais

Title:

MICROFABRICATION OF HIGH-ASPECT-RATIO MICROSTRUCTURES BY LIGA TECHNOLOGY (LITHOGRAPHY, ELECTROFORMING AND MOLDING)

Summary :

THE LIGA TECHNOLOGY ALLOWS THE BATCH PRODUCTION OF HIGH-ASPECT-RATIO MICROSTRUCTURES FROM METALS, POLYMERS AND CERAMICS. METALLIC MICROSTRUCTURES LIKE GEARS, TURBINES, FILTERS, SPRINGS AND MOLDS FOR INJECTION MOLDING OR FOR HOT EMBOSSING ARE ELECTROPLATED IN THE PRIMARY POLYMER MOLDS PRODUCED BY LITHOGRAPHY. THE MORE USUALLY ELECTROPLATED METALS ARE NI, CU, CR, AU AND NI-FE ALLOYS. THE METALLIC MOLDS ARE USED TO PRODUCE POLYMER MICROSTRUCTURES LIKE GEARS, TURBINES, FILTERS, CHEMICAL REACTORS, PUMPS, LENS, PRISMS, OPTICAL WAVEGUIDES, ETC. THE TYPICAL LATERAL DIMENSIONS OF THE MICROSTRUCTURES ARE BETWEEN FEW MICRONS AND FEW MILLIMETERS. ITS TYPICAL THICKNESS IS BELLOW 500M AN ALMOST COMPLETE LIGA TECHNOLOGY WAS DEVELOPED AT LNLS, BOTH USING THE HIGH-PRECISION DEEP X-RAY LITHOGRAPHY OR THE SIMPLER DEEP UV LITHOGRAPHY FOR PRIMARY MOLD PRODUCTION. THIS TECHNOLOGY IS BEING USED FOR PRODUCING POLYMERIC MICRO-MINIATURE CHEMICAL REACTORS, FILTERS, GEARS, SPRINGS, TURBINES AND FLOW MACHINES. THE TYPICAL DIAMETER OF THE GEARS ARE BETWEEN 470M AND 4000M, AND THEIR TYPICAL THICKNESS IS BETWEEN 35M AND 500M. THE SAME KIND OF MICROSTRUCTURES WERE ALSO PRODUCED FROM METALS, BY ELECTROFORMING NI, CU AND AU IN POLYMER MOLDS. METALLIC MOLDS FOR PRODUCTION OF POLYMER PARTS BY HOT EMBOSSING WERE ALSO PRODUCED. KEYWORDS: MICROFABRICATION, HIGH PRECISION ENGINEERING, MICROELECTROMECHANICAL SYSTEMS, MEMS.

Author :

Bagnato, Osmar Roberto
Ferreira, Luiz Otávio S.
Gobbi, Angelo Luís
Natal, Graziele Capeleto

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