| 0225 |
Research Examples And Development Of Surface Micromachining
Process Using Porous Si As Sacrificial Layer |
| 0427 |
Development of a XY Piezoelectric Nanopositioner |
| 0994 |
Damper Valve Design using Finite Element Technique and Neuro-Fuzzy
Approaches |
| 1040 |
Development and Characterization of a Unimorph-type Piezoelectric
Actuator Applied to a Michelson Interferometer |
| |
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